@article{914031,
  author = {Kwanseob Park and Yoon Sung Bae and Sang-Soo Choi and Martin Sohn},
  title = {High numerical aperture reflective deep ultraviolet Fourier ptychographic microscopy for nanofeature imaging},
  year = {2022},
  number = {7},
  month = {2022-09-08 04:09:00},
  publisher = {APL Photonics},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=934871},
  doi = {https://doi.org/10.1063/5.0102413},
  language = {en},
}