@conference{91106,
  author = {Christopher Evans and R Parks and L Shao and Tony Schmitz and Angela Davies},
  title = {Interferometric Testing of Photomask Blank Flatness},
  year = {2001},
  number = {4344},
  month = {2001-02-28},
  publisher = {SPIE International Symposium on Microlithography, Santa Clara, CA},
  language = {en},
}