@conference{90556,
  author = {James Gilsinn and Hui Zhou and Bradley Damazo and Joseph Fu and Richard Silver},
  title = {Nano-Lithography in Ultra-High Vacuum (UHV) for Real World Applications},
  year = {2004},
  number = {3},
  month = {2004-03-01},
  publisher = {Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Boston, MA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=822172},
  language = {en},
}