@article{900346,
  author = {Robert Cook and Lawrence Henry Friedman},
  title = {Weakly anisotropic residual contact stress in silicon demonstrated by electron backscatter diffraction and expanding cavity models},
  year = {2018},
  month = {2018-12-07 05:12:00},
  publisher = {Applied Physics Letters},
  doi = {https://doi.org/10.1063/1.5055859},
  language = {en},
}