@article{900196,
  author = {Christopher Szakal and Steven Hues and J Greg Gillen and Joe Bennett},
  title = {Effect of Cluster Ion Analysis Fluence on Interface Quality in SIMS Molecular Depth Profiling},
  year = {2009},
  month = {2009-11-10 05:11:00},
  publisher = {The Journal of Physical Chemistry C},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=901692},
  doi = {https://doi.org/10.1021/jp905019x},
  language = {en},
}