@article{900176,
  author = {Shinichiro Muramoto and Cayla Collett},
  title = {Changes in Crater Shape Caused by Low Angular Sputtered Flux during SIMS Argon Cluster Depth Profiling of Ultrathick Films},
  year = {2018},
  month = {2018-08-10 04:08:00},
  publisher = {Journal of Vacuum Science and Technology A},
  language = {en},
}