@article{893446,
  author = {E Landree and Terrence J. Jach},
  title = {Characterization of Ultrathin Silicon-Oxynitride Films Using Grazing Incidence X-Ray},
  year = {2008},
  month = {2008-10-16 14:10:10},
  publisher = {Materials Research Society Symposium},
  language = {en},
}