@article{893411,
  author = {Cedric Powell and W Werner and W Smekal},
  title = {Distinguishability of N Composition Profiles in SiON Films on Si by Angle-Resolved X-Ray Photoelectron Spectroscopy},
  year = {2008},
  month = {2008-10-16 14:10:10},
  publisher = {Applied Physics Letters},
  language = {en},
}