@article{893396,
  author = {David Bright and Jake Scott},
  title = {Beam Tilt, Defocus, and Vibration Contribute to HRTEM Gate Dielectric Thickness Measurement Uncertainty},
  year = {2008},
  month = {2008-10-16 14:10:10},
  publisher = {Journal of Microscopy-Oxford},
  language = {en},
}