@article{892756,
  author = {C Russell and S Owens and A Diebold and R Deslattes},
  title = {Using Graying Incidence X-Ray Reflectivity to Characterize Thin Films for Semiconductor Applications},
  year = {2008},
  month = {2008-10-16 14:10:14},
  publisher = {Thin Solid Films},
  language = {en},
}