@article{89256,
  author = {James Maslar and Wilbur Hurst and Donald Burgess and William Kimes and Nhan Nguyen},
  title = {In Situ Characterization of Gas-Phase Species Present During Hafnium Oxide Atomic Layer Deposition},
  year = {2007},
  number = {2},
  month = {2007-01-01},
  publisher = {ECS Transactions},
  doi = {https://doi.org/10.1149/1.2408909},
  language = {en},
}