@article{892501, author = {John Burnett and Ulf Griesmann and R Gupta and T Jou}, title = {Index of Retraction and its Temperature Dependence of Calcium Fluoride Near 157nm}, year = {2008}, month = {2008-10-16 14:10:14}, publisher = {International Symposium on Microelectronics}, language = {en}, }