@article{892331,
  author = {R Matyi},
  title = {High Resolution X-ray Scattering Methods for ULSI Materials Characterization and Metrology for ULSI Technology},
  year = {2008},
  month = {2008-10-16 14:10:14},
  publisher = {International Conference on Characterization and Metrology for ULSI Technology},
  language = {en},
}