@misc{892131,
  author = {D DeWitt},
  title = {Determining Wafer Temperature From Spectral Radiance Temperature in the NIST RTP Test Bed},
  year = {2008},
  month = {2008-10-16 14:10:14},
  publisher = {Determining Wafer Temperature From Spectral Radiance Temperature in the NIST RTP Test Bed},
  language = {en},
}