@article{892066,
  author = {John T. Woodward IV and Harun Solak},
  title = {Chemical Force Microscopy of 30 nm Half-Pitch Latent Images in Poly(Methyl-Methacrylate)},
  year = {2008},
  month = {2008-10-16 14:10:14},
  publisher = {Journal of Vacuum Science and Technology B},
  language = {en},
}