@article{891441,
  author = {Thomas P. Moffat and Daniel Wheeler and Soo Kim and Daniel Josell},
  title = {Curvature Enhanced Adsorbate Coverage Mechanism for Bottom-Up Superfilling and Bump Control in Damascene Processing},
  year = {2008},
  month = {2008-10-16 14:10:19},
  publisher = {Electrochimica Acta},
  language = {en},
}