@article{891436,
  author = {Philip Pong and Moshe Schmoueli and William Egelhoff Jr.},
  title = {Fabrication of Spintronic Devices - Etching Endpoint Detection by Resistance Measurement for Magnetic Tunnel Junctions},
  year = {2008},
  month = {2008-10-16 14:10:19},
  publisher = {SPIE},
  language = {en},
}