@misc{891341,
  author = {Barry Bauer and Hae-Jeong Lee and R Hedden and Da-Wei Liu and Wen-Li Wu},
  title = {Pore Size Distributions in Low-k Thin Films by X-Ray Reflectivity and Small Angle Neutron Scattering},
  year = {2008},
  month = {2008-10-16 14:10:19},
  publisher = {Pore Size Distributions in Low-k Thin Films by X-Ray Reflectivity and Small Angle Neutron Scattering},
  language = {en},
}