@article{891146, author = {Eric Lin and D Pochan and R Kolb and Wen-Li Wu and Sushil K. Satija}, title = {Neutron Reflectivity for Interfacial Materials Characterization}, year = {2008}, month = {2008-10-16 14:10:19}, publisher = {International Conference on Characterization and Metrology for ULSI Technology}, language = {en}, }