@article{890961,
  author = {Eric Lin and Ronald Jones and Wen-Li Wu and John Barker and P Bolton and Z Barclay},
  title = {Structural Characterization of Deep Sub-Micron Lithographic Structures Using Angle Neutron Scattering},
  year = {2008},
  month = {2008-10-16 14:10:19},
  publisher = {SPIE Meeting},
  language = {en},
}