@misc{890871,
  author = {Frank W. Gayle},
  title = {FY 2001 Programs and Accomplishments - Materials for Microelectronics},
  year = {2008},
  month = {2008-10-16 14:10:19},
  publisher = {NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD},
  language = {en},
}