@article{890411,
  author = {Hae-Jeong Lee and Eric Lin and J Lan and Y Cheng and H Liou and Wen-Li Wu and Y Wang and M Feng and C Chao},
  title = {Investigation of N<sub>2</sub> Plasma Effects on the Depth Profile of Hydrogen Silsesquioxane Thin Films Using High Resolution Specular X-Ray Reflectivity},
  year = {2008},
  month = {2008-10-16 14:10:19},
  publisher = {Characterization and Metrology for ULSI Technology Conference},
  language = {en},
}