@article{890406,
  author = {David VanderHart and Vivek Prabhu},
  title = {Photoacid Generator Dispersion in Partially Fluorinated Photoresist Polymers and their Blends},
  year = {2008},
  month = {2008-10-16 14:10:19},
  publisher = {Chemistry of Materials},
  language = {en},
}