@article{889286,
  author = {M Wagner and J Greg Gillen},
  title = {Impact Energy Dependence of SF<sub>5</sub><sup>+</sup> Ion Beam Damage of Poly(Methyl Methacrylate) Studied by Time-of-Flight Secondary Ion Mass Spectrometry},
  year = {2017},
  month = {2017-02-19 20:02:57},
  publisher = {Applied Surface Science},
  language = {en},
}