@article{887961, author = {Andrew Madison and John S. Villarrubia and Kuo-Tang Liao and Craig R. Copeland and Joshua Schumacher and Kerry Siebein and Robert Ilic and James Alexander Liddle and Samuel M. Stavis}, title = {Unmasking the Resolution–Throughput Tradespace of Focused-Ion-Beam Machining}, year = {2022}, number = {32}, month = {2022-08-21 04:08:00}, publisher = {Advanced Functional Materials}, doi = {https://doi.org/10.1002/adfm.202111840 }, language = {en}, }