@conference{88706,
  author = {Michael Cresswell and M Davidson and Geraldine Mijares and Richard Allen and Jon Geist and M Bishop},
  title = {Mapping the Edge-Roughness of Test Structure Features for Nanometer-Level CD Reference-Materials},
  year = {2009},
  month = {2009-04-02},
  publisher = {Proceedings of the 2009 International Conference on Microelectronic Test Structures, Oxnard, CA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=901520},
  language = {en},
}