@article{885421,
  author = {James E. Maslar and William A. Kimes and Brent Sperling and Ravindra Kanjolia},
  title = {Non-dispersive infrared gas analyzer for partial pressure measurements of a tantalum alkylamide during vapor deposition processes},
  year = {2020},
  number = {74},
  month = {2020-08-24 04:08:00},
  publisher = {Applied Spectroscopy},
  doi = {https://doi.org/10.1177/0003702819885182},
  language = {en},
}