@article{885416, author = {James E. Maslar and William A. Kimes and Brent Sperling and Ravindra Kanjolia}, title = {Characterization of vapor draw vessel performance for low-volatility solid precursor delivery}, year = {2020}, number = {39}, month = {2020-12-10 05:12:00}, publisher = {Journal of Vacuum Science & Technology A}, doi = {https://doi.org/10.1116/6.0000676}, language = {en}, }