@article{880896, author = {Mark Anders and Patrick Lenahan and Arthur Edwards and Peter Schultz and Renee Van Ginhoven}, title = {Effects of Nitrogen on the Interface Density of States Distribution in 4H-SiC Metal Oxide Semiconductor Field Effect Transistors: Super-hyperfine Interactions and Near Interface Silicon Vacancy Energy Levels}, year = {2018}, number = {124}, month = {2018-11-13 05:11:00}, publisher = {Journal of Applied Physics}, doi = {https://doi.org/10.1063/1.5045668}, language = {en}, }