@article{877601,
  author = {David S. Simons and Kyung Joong KIM and Jong Jang and Joe Bennett and Mario Barozzi and Akio Takano and Zhanping Li and C. Magee},
  title = {Round-Robin Test for the Measurement of Layer Thickness of Multilayer Films by Secondary Ion Mass Spectrometry Depth Profiling},
  year = {2017},
  month = {2017-07-04 04:07:00},
  publisher = {Surface and Interface Analysis},
  language = {en},
}