@article{article,
  author = {P.E. Thompson and G.G. Jernigan and David S. Simons and P. Chi and B.T. Jonker and O.M.J. van {\textquoteright}t Erve},
  title = {Phosphorus Doping of Silicon at Substrate Temperatures Above 600 \&$\#$176;C},
  year = {2009},
  month = {2009-10-22 04:10:00},
  publisher = {Thin Solid Films},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=902765},
  language = {en},
}