@conference{87756,
  author = {Joaquin Martinez and Yaw Obeng and Stephen Knight},
  title = {Advanced Metrology for Nanoelectronics at the National Institute of Standards and Technology},
  year = {2009},
  month = {2009-03-11},
  publisher = {FDP (Flat Panel Display) China 2009, Shanghai, CH},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=901409},
  language = {en},
}