@conference{876936, author = {Duane McCrory and Mark Anders and Jason Ryan and Pragya Shrestha and Kin Cheung and Patrick Lenahan and Jason Campbell}, title = {Wafer Level EDMR with Spatial Resolution Capabilities: Magnetic Resonance in a Probing}, year = {2018}, month = {2018-01-31 05:01:00}, publisher = {2017 IEEE International Integrated Reliability Workshop Final Report, Fallen Leaf, CA, US}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=924750}, language = {en}, }