@conference{871511, author = {Vikrant Gokhale and Jason Gorman}, title = {Direct Measurement of Dissipation in Phononic Crystal and Straight Tethers for MEMS Resonators}, year = {2017}, month = {2017-01-21 05:01:00}, publisher = {IEEE International Conference on Micro Electro Mechanical Systems, Las Vegas, NV, US}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=922234}, language = {en}, }