@conference{871506,
  author = {Joshua Pomeroy and Kevin Dwyer and Ke Tang and Hyun Kim and Aruna Ramanayaka and David Simons},
  title = {Enriching and purifying silicon epilayers for quantum information},
  year = {2016},
  month = {2016-12-06 05:12:00},
  publisher = {ISDRS 2016 PROCEEDINGS, Bethesda, MD, US},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=922263},
  language = {en},
}