@conference{871501, author = {John Villarrubia and Vipin Tondare and Andras Vladar}, title = {Assessing Scanning Electron Microscopy Stereophotogrammetry Algorithms with Virtual Test Samples}, year = {2017}, month = {2017-03-20 04:03:00}, publisher = {Frontiers of Characterization and Metrology for Nanoelectronics 2017, Monterey, CA, US}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=922328}, language = {en}, }