@conference{871476, author = {Bryan Barnes and Mark-Alexander Henn and Hui Zhou and Martin Sohn and Richard Silver}, title = {Assessing Quantitative Optical Imaging for Realizing In-die Critical Dimension Metrology}, year = {2017}, month = {2017-03-19 04:03:00}, publisher = {2017 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, Monterey, CA, US}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=923066}, language = {en}, }