@conference{871471,
  author = {Mark-Alexander Henn and Bryan Barnes and Hui Zhou},
  title = {Evaluating the Effects of Modeling Errors for Isolated Finite3-D Targets},
  year = {2017},
  number = {10145},
  month = {2017-03-29 04:03:00},
  publisher = {SPIE Advanced Lithography 2017, San Jose, CA, US},
  doi = {https://doi.org/10.1117/12.2262544},
  language = {en},
}