@conference{871466,
  author = {Bryan Barnes and Hui Zhou and Mark-Alexander Henn and Martin Sohn and Richard Silver},
  title = {Assessing the wavelength extensibility of optical patterned defect inspection},
  year = {2017},
  number = {10145},
  month = {2017-03-29 04:03:00},
  publisher = {Proceedings of the SPIE, San Jose, CA, US},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=923116},
  doi = {https://doi.org/10.1117/12.2262191},
  language = {en},
}