@conference{871441,
  author = {Bryan Barnes and Hui Zhou and Mark-Alexander Henn and Martin Sohn and Richard Silver},
  title = {Optimizing image-based patterned defect inspection through FDTD simulations at multiple ultraviolet wavelengths},
  year = {2017},
  number = {10330},
  month = {2017-06-25 04:06:00},
  publisher = {Proceedings of the SPIE, Munich, DE},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=923390},
  doi = {https://doi.org/10.1117/12.2271149},
  language = {en},
}