@conference{871421,
  author = {Jessie Zhang and Gymama Slaughter and Matthew Robinson and Joel Tyson},
  title = {Neuroelectronic Device Process Development and Challenge},
  year = {2017},
  number = {101470W},
  month = {2017-03-16 04:03:00},
  publisher = {Proceedings of SPIE, Optical Microlithography XXX, San Jose, CA, US},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=921683},
  doi = {https://doi.org/10.1117/12.2256297},
  language = {en},
}