@article{871,
  author = {Gheorghe Stan and Cristian Ciobanu and Igor Levin and Mark van and Alan Myers and Kanwal Singh and Christopher Jezewski and Barbara Miner and Sean King},
  title = {Nanoscale buckling of ultrathin low-k dielectric lines during hard-mask patterning},
  year = {2015},
  month = {2015-05-07},
  publisher = {Nano Letters},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=917567},
  language = {en},
}