@conference{869706,
  author = {Thomas Michels and Vladimir Aksyuk},
  title = {Cavity optical transducer platform with integrated actuation for multiple sensing applications},
  year = {2016},
  month = {2016-06-04 04:06:00},
  publisher = {Proceedings, Solid State Sensor, Actuator and Microsystems Workshop, Hilton Head Island, SC, US},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=920652},
  language = {en},
}