@conference{869666,
  author = {Michael Postek and Andras Vladar},
  title = {Does Your SEM Really Tell the Truth?—How Would You Know? Part 4: Charging and its Mitigation},
  year = {2016},
  month = {2016-01-19 05:01:00},
  publisher = {SPIE/SCANNING 2015, Monterey, CA, US},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=918741},
  language = {en},
}