@article{866,
  author = {Gheorghe Stan and Richard Gates and Premsagar Kavuri and Jessica Torres and David Michalak and Canay Ege and Jeff Bielefeld and Sean King},
  title = {Mechanical property changes in porous low-k dielectric thin films during processing},
  year = {2014},
  month = {2014-10-15},
  publisher = {Applied Physics Letters},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=916271},
  language = {en},
}