@article{852091,
  author = {Jungjoon Ahn and Santiago Solares and Lin You and Hanaul Noh and Joseph Kopanski and Yaw Obeng},
  title = {Probe assisted localized doping of aluminum into silicon substrates},
  year = {2019},
  number = {125},
  month = {2019-02-20 00:02:00},
  publisher = {Journal of Applied Physics},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=925130},
  doi = {https://doi.org/10.1063/1.5065385},
  language = {en},
}