@conference{851901, author = {Li-Anne Liew and John Moreland and V Gerginov}, title = {Wafer-Level Fabrication and Filling of Cesium-Vapor Resonance Cells for Chip-Scale Atomic Devices}, year = {2006}, month = {2006-10-15 04:10:00}, publisher = {Proceedings of 20th Eurosensors Conference, Goteborg, 1, SW}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32413}, language = {en}, }