@article{848046, author = {Kamil Ekinci and V. Yakhot and Sukumar Rajauria and C. Colosqui and D. Karabacak}, title = {High-Frequency Nanofluidics: A Universal Formulation of the Fluid Dynamics of MEMS and NEMS}, year = {2010}, number = {10}, month = {2010-09-23 00:09:00}, publisher = {Lab on A Chip}, language = {en}, }