@conference{847826,
  author = {Joseph Kopanski and Jay Marchiando},
  title = {Quantitative Interpretation of Scanning Capcitance Microscope Images as Two-Dimensional Dopant Profiles},
  year = {2004},
  month = {2004-03-10 00:03:00},
  publisher = {29th International Symposium for Testing and Failure Analysis, ISTFA 2003 Conference Proceedings, Santa Clara, CA, USA},
  language = {en},
}