@article{847776, author = {Safak Sayan and Mark Croft and Nhan Nguyen and Tom Emge and Evgeni Gusev and Hyunjung Kim and James Ehrstein and Paul McIntyre and Eric Garfunkel}, title = {Amorphous to Tetragonal Transition in Ultrathin Zirconia Films: Effect on the Electronic and Dielectric Properties}, year = {2005}, number = {15}, month = {2005-09-01 00:09:00}, publisher = {Applied Physics Letters}, language = {en}, }